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| Professor ECE Georgia Institute of Technology School of Electrical & Computer Engineering 777 Atlantic Avenue NW Georgia Institute of Technology Atlanta, GA 30332-0250 Phone: 404-894-9420 B.S. Georgia Tech 1985 |
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Gary May
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| Description of Research | |||
| Computer-aided manufacturing of integrated circuits and devices. Monitoring, modeling, simulation, control and diagnosis of semiconductor fabrication processes. IC design for manufacturability. IC yield modeling. | |||
| Recent Papers or Publications | |||
| G. May, "Computational Intelligence in Microelectronics Manufacturing," Chapter 11 in the Handbook of Computational Intelligence in Design and Manufacturing (J. Wang and A. Kusiak, Eds.), Boca Raton, FL: CRC Press, 2000. G. May, "Neural Nets for Semiconductor Manufacturing," Wiley Encyclopedia of Electrical and Electronic Engineering (J.G. Webster, Ed.), vol. 14, pp. 298-323, New York: Wiley, 1999. M. Baker, F. Williams, and G. May, "A Novel In-Situ Monitoring Technique for Reactive Ion Etching Using a Surface Micromachined Sensor," IEEE Trans. Semi. Manufac., vol. 11, no. 2, pp. 254-265, May, 1998. Winner of 1998 Best Paper Award. |
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| Special Honors or Awards | |||
| Georgia Tech Outstanding Service Award 1999 Outstanding Paper Award, IEEE Transactions on Semiconductor Manufacturing 1998 Senior Member, IEEE 1997-present Senior Member, Society of Manufacturing Engineers 1996-present Georgia Tech Packaging Research Center Faculty of the Year for Education 1996 National Science Foundation National Young Investigator 1993-98 Outstanding Young Alumnus, Georgia Institute of Technology, 1993 National Science Foundation Graduate Fellow 1986-89 AT&T Bell Laboratories Cooperative Research Fellow 1986-91 |
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